发明名称 |
Thermal control of a DUT using a thermal contro substrate |
摘要 |
A solid state thermal control device contains a substrate and a plurality of solid state thermal elements on the substrate. The thermal elements are adapted to provide thermal control to a device under test (DUT). Each solid state thermal element contains at least one solid state heater and an active control circuit adapted to control a thermal output of the heater. Optionally, the each thermal element may also include a solid state temperature sensor.
|
申请公布号 |
US2004012404(A1) |
申请公布日期 |
2004.01.22 |
申请号 |
US20020197880 |
申请日期 |
2002.07.19 |
申请人 |
DELTA DESIGN, INC. |
发明人 |
FEDER JAN;BEYERLE RICK;BYERS STEPHEN;JONES THOMAS |
分类号 |
G01R31/28;H01L21/00;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|