发明名称 Cross flow processor
摘要 A centrifugal processor includes an elongated inlet and outlet in fluid communication with a rotor housing having an eccentric bowl. A rotor having fan blades and adapted to hold flat media is rotatably disposed within the rotor housing. An intake gate is pivotably mounted to the rotor housing to swing about the rotor into a closed position during a rinse mode and into an open position during a drying mode. The gate has a wedge that is designed to almost contact the rotor when the gate is in the open position for drying. The geometry of the elongated inlet, outlet, and eccentric bowl, in combination with the design of the rotor and that of the intake gate, work together to create a cross flow fan having a flow path across the flat media and one that exposes the flat media to large volumes of incoming air only once.
申请公布号 US2004010930(A1) 申请公布日期 2004.01.22
申请号 US20020200073 申请日期 2002.07.19
申请人 SEMITOOL, INC. 发明人 DOLECHEK KERT;DAVIS JEFFRY
分类号 H01L21/00;(IPC1-7):F26B17/24;F26B17/30;F26B19/00;F26B25/06;F26B5/08 主分类号 H01L21/00
代理机构 代理人
主权项
地址