| 摘要 |
<p>The device has a main valve and a servovalve operated by an actuator to regulate opening of the main valve, which is operated by a membrane bounding a first gas chamber. The servovalve is a 3-way valve connected via gas lines to the first gas chamber, a second gas chamber in the inlet region and a third gas chamber in the outlet region. The 3-way valve arrangement optionally connects the first gas chamber to the second or third gas chamber. The device has a main valve and a servovalve operated by an actuator to regulate opening of the main valve, which is operated by a membrane (3) bounding a first gas chamber (5). The servovalve is a three-way valve (9) connected via gas lines (6-8) to the first gas chamber, a second gas chamber (4) in the inlet region and a third gas chamber (11) in the outlet region. The three-way valve arrangement optionally connects the first gas chamber to the second or third gas chamber.</p> |
