METHOD AND APPARATUS FOR THE PRODUCTION OF PROCESS GASES,申请号EP20020764065-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR THE PRODUCTION OF PROCESS GASES
摘要
申请公布号	EP1382063(A1)	申请公布日期	2004.01.21
申请号	EP20020764065	申请日期	2002.04.19
申请人	MATTSON THERMAL PRODUCTS GMBH	发明人	ROTERS, GEORG;MADER, ROLAND;SOMMER, HELMUT;ERLIKH, GENRIH;PASHUT, YEHUDA
分类号	H01L21/31;F22B1/00;H01L21/316;(IPC1-7):H01L21/316	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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