Surface recovery of contaminated deposition tools

摘要

A process for treating a contaminated tool previously used for vapour or other deposition is disclosed. The process comprises chemical oxidation (3) followed by abrasive blasting (4) and rinsing (5). Contaminated material is removed by acid (3, 6) and water used for high pressure spray rinsing (5). Such removal involves one or more of sequestration followed by filter press, coarse filter mesh in bath weir return, and use of magnets. Drying (12) is performed without direct heat input, temperature rise of the tool being achieved by clean air recirculation by centrifuge fan into a vortex release. The dried tool is packed (15) with inert gas purging in a cleanroom for shipment and re-use. <IMAGE> <IMAGE>