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发明名称
METHOD FOR PRODUCING A SEMI-CONDUCTOR ARRANGEMENT AND THE USE OF AN ION BEAM ARRANGEMENT FOR CARRYING OUT SAID METHOD
摘要
申请公布号
EP1382061(A2)
申请公布日期
2004.01.21
申请号
EP20020757724
申请日期
2002.03.25
申请人
INFINEON TECHNOLOGIES AG
发明人
GOEBEL, BERND;MOLL, PETER;GUTSCHE, MARTIN;SEIDL, HARALD
分类号
H01L21/033;H01L21/311;H01L21/8242;(IPC1-7):H01L21/033
主分类号
H01L21/033
代理机构
代理人
主权项
地址
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