Method and apparatus for performing atomic force microscopy measurements

摘要

The present invention is related to a method and apparatus for performing Atomic Force Microscopy. In the method of the invention, a force and speed profile is defined, which is a force speed change as a function of time and a sample is scanned by the AFM probe in such a way that the force between the sample and the probe is changed according to said predefined profile. The invention is equally related to an apparatus with which to perform said method. <IMAGE>