| 摘要 |
<p>Incorporating an anode (1) and a cathode or target (2), from which is obtained the evaporated material which will be applied to piece (10) to be coated within a vacuum chamber, and where with a magnetic guide it is endeavoured that the action of the electric arc on the target be displaced over the whole surface thereof, in a homogeneous way, the aforementioned magnetic guide is constituted by means of two independent magnetic systems, a first magnetic system constituted by a group of permanent magnets (3) located on the periphery of the cathode or target (2), in a disposition noticeably coplanar with the same, so that magnetization thereof is perpendicular to the surface of said target (2), and a second magnetic system constituted by an electromagnet (4-5), located in the rear part of target (2), housed in electrically insulating body (6) of the evaporator and at a certain distance from said target (2), with at least one of its magnetic poles parallel to the surface of said target (2), so that the combined action of the two magnetic systems determines uniform use or consumption of target (2), at the same time as an increased reliability of the evaporator. <IMAGE></p> |
