Micro mechanical pressure transducer with sensor at the separating diaphragm of the housing

摘要

The device has a micromechanical housing (11) with a cavity (16) for a fluid whose pressure is to be measured to which a membrane type pressure sensor (12) is attached in micromechanical structural manner. An isolating membrane (22) in the housing is formed as a region of thinner wall joined on one side to the pressure sensor and exposed on its other side to the fluid with the pressure to be measured.