发明名称 Simulation method of breakdown
摘要 An electric field distribution is calculated by means of a drift diffusion model, and a one-dimensional electric field distribution is taken out from a result of the calculation, and this electric field distribution which was taken out is provided to a one-dimensional Monte Carlo device simulation to calculate a distribution of impact ionization coefficients, and G<n>(x) is calculated by using an equation 1 to an equation 5 which are described belowand as a result of this calculation, it is determined that a breakdown does not occur in case that, as n becomes to be large, G<n>(x) converges to a constant value, and final electric current density is calculated, and it is determined that a breakdown occurs in case that G<n>(x) becomes to be large as n increases.
申请公布号 US6681201(B1) 申请公布日期 2004.01.20
申请号 US20000575280 申请日期 2000.05.22
申请人 NEC ELECTRONICS CORPORATION 发明人 SAWAHATA KOUICHI
分类号 H01L29/00;G06F17/50;H01L29/861;H01L31/10;(IPC1-7):G06F17/10;G06F7/66;G06G7/48 主分类号 H01L29/00
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