| 发明名称 |
Metal anneal with oxidation prevention |
| 摘要 |
The invention relates generally to the prevention of copper oxidation during copper anneal processes. In one aspect of the invention, copper oxidation is prevented by carrying out the anneal in the presence of one or more organic reducing agents.
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| 申请公布号 |
US6679951(B2) |
申请公布日期 |
2004.01.20 |
| 申请号 |
US20010991332 |
申请日期 |
2001.11.13 |
| 申请人 |
ASM INTENATIONAL N.V. |
发明人 |
SOININEN PEKKA J.;ELERS KAI-ERIK;GRANNEMAN ERNST H. A. |
| 分类号 |
H01L21/285;H01L21/3105;H01L21/3205;H01L21/768;(IPC1-7):C23C22/00 |
主分类号 |
H01L21/285 |
| 代理机构 |
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