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发明名称
LOW DIELECTRIC CONSTANT FILMS DERIVED BY SOL-GEL PROCESSING OF A HYPERBRANCHED POLYCARBOSILANE
摘要
申请公布号
AU2003267968(A1)
申请公布日期
2004.01.19
申请号
AU20030267968
申请日期
2003.06.23
申请人
RENSSELAER POLYTECHNIC INSTITUTE
发明人
LEONARD, VINCENT INTERRANTE;NING LU
分类号
C08G77/50;C09D183/14;H01L21/312;H01L21/768;(IPC1-7):H01B3/00
主分类号
C08G77/50
代理机构
代理人
主权项
地址
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