DEFLECTION SYSTEM FOR A PARTICLE BEAM DEVICE,申请号KR20037014300-传众专利搜索

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发明名称	DEFLECTION SYSTEM FOR A PARTICLE BEAM DEVICE
摘要
申请公布号	KR20040005943(A)	申请公布日期	2004.01.16
申请号	KR20037014300	申请日期	2003.11.03
申请人		发明人
分类号	H01J37/30;H01J37/147;H01J37/153;H01J37/21	主分类号	H01J37/30
代理机构		代理人
主权项
地址

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