| 摘要 |
PURPOSE: A matching device is provided to enlarge easily a variable capacitor for generating the electric potential difference and generate stably plasma by generating reflective waves according to the input power. CONSTITUTION: A matching device includes a sensor(50), a controller(60), a plurality of variable capacitors(90), a motor portion(70,80), a fixing inductor(40), and a DC bias(30). The sensor(50) is used for sensing an impedance value by checking the voltage and current of the input power. The controller(60) is used for controlling an operation of a matching circuit by adjusting the impedance value. The variable capacitors(90) are connected in parallel to the sensor(50) in order to generate reflective waves. The motor portion(70,80) controls the capacitance by driving the variable capacitors(90). The fixing inductor(40) is connected in parallel between the variable capacitors(90) in order to decide a range of the matching circuit. The DC bias(30) is used for measuring the electric potential difference of plasma of electrons according to a control signal of the controller(60).
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