LOW TEMPERATURE PLASMA GENERATING DEVICE

摘要

PURPOSE: A low temperature plasma generating device is provided to reduce manufacturing costs and fuel costs, while preventing an environmental contamination. CONSTITUTION: A low temperature plasma generating device comprises a main body(1) having a cathode(2) and an anode(4); a beam route(10) having a conical nozzle shape; a vacuum chamber(12) fixed to the beam route by a screw(11); a turbine particle pump(31) for maintaining the interior of the main body at a vacuum state; first electrodes(14,15) for forming a semi-conical pipe in the vacuum chamber; a second electrode(16) disposed in the first electrode(15); and a target(19) arranged at the lower end of the case.