| 摘要 |
PROBLEM TO BE SOLVED: To avoid shortage in the number of measurable pins on an LSI tester side when the number of pins in a semiconductor integrated circuit is increased or when the inspection number inspected concurrently is increased, when a plurality of semiconductor integrated circuits are inspected at the same time. SOLUTION: This circuit is provided with a means for inputting the same input signal to an input for a non-defective sample 101 of the semiconductor integrated circuit of an inspection object, and an input for a plurality of semiconductor integrated circuits 102, 106 of inspection objects, a means for comparing the output from the non-defective sample with the output from each of the respective semiconductor integrated circuits of inspection objects, and a means for determining that matching in every output signal is detected in the comparison result for all of the output signals of the semiconductor integrated circuits of inspection object. The plurality of semiconductor integrated circuits are inspected at the same time by comparing individually the output from each of the respective semiconductor integrated circuits of the inspection objects with the output from the non-defective sample. COPYRIGHT: (C)2004,JPO
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