摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a resistive element ensuring a desired resistance, and its producing process in which a significant variation in the resistance of the entire resistive element can be avoided even if a given thickness part on the surface side of the resistor is removed together with an oxide film, when the oxide film is removed by forming the resistor of a plurality of resistive layers of different specific resistance. <P>SOLUTION: The resistor 3 comprises a plurality of resistor layers 3a and 3b of different specific resistance formed in layer on a substrate 2 wherein the resistor layer 3a of higher specific resistance is formed on the upper layer side. <P>COPYRIGHT: (C)2004,JPO</p> |