| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit projection type automatic focusing device permitting automatic focusing control to an object for observation even if using a lens reflecting slit-form lighting at the center part. SOLUTION: In the slit projection type automatic focusing device which makes the lighting from an LED light source into a slit form through a slit plate 22, emitting and focusing the lighting 11 on a specimen on a stage 11 through an objective lens 12, focusing the reflected light on the CCD 30 for automatic focusing through a first objective lens 12, positioning the specimen at the focal position of the the first objective lens 12, the reflection of the lighting on the first projective lens 12 is inhibited so that the automatic focusing control normally operates, by arranging a shading filter 32 between a collector lens 32 and a first pupil limiting mask 24 to shade the center part of the slit form lighting. COPYRIGHT: (C)2004,JPO |
