| 摘要 |
PROBLEM TO BE SOLVED: To prevent decline of the intensity of light incident on a sample, to miniaturize a sample moving mechanism by dispensing with tilting of the sample at the measuring time of the reflectance, to shorten the vacuum evacuation time and the measuring time, and to enable reflectance measurement for the normal direction to the sample surface. SOLUTION: This spectrometer has a constitution wherein a sample and a sample photodetector are arranged just behind an outlet slit of a spectroscopic element by adopting a constitution equipped with the spectroscopic element, a first photodetector arranged on the extension of the positions of the spectroscopic element and the sample, and a second photodetector moving linked with a spectral angle of the spectroscopic element. Light emitted from the outlet slit is made to incident on the sample or the sample photodetector before it diverges by this constitution, to thereby dispense with a condensing mirror for condensing diverging light, and to prevent attenuation of the light intensity caused by the mirror. COPYRIGHT: (C)2004,JPO
|
