METHOD FOR WASHING COMPONENT

摘要

PROBLEM TO BE SOLVED: To wash a component with a specific gravity smaller than that of a liquid washing medium. SOLUTION: A component with a small specific gravity can be washed by blowing dry ice particles using a carrier gas while being vacuum sucked in a component fixation plate. To improve the washing efficiency, the size and the blowing angle of the dry ice particles are changed depending on the component. The temperature of the carrier gas and the fixation plate is controlled for preventing dew formation. COPYRIGHT: (C)2004,JPO