Light heating apparatus and method therefor

摘要

In a light heating apparatus having a flash lamp in which noble gas is enclosed, a casing surrounding the flash lamp, a stage where a silicon wafer on which light from the flash lamp is emitted is placed, and a power feeding apparatus for controlling light emission of the flash lamp, B/A is greater than 1.0 wherein integrated radiant intensity in a range from 220 to 370 nm wavelength is represented as A and integrated radiant intensity in a range from 370 to 800 nm wavelength.