| 摘要 |
PROBLEM TO BE SOLVED: To provide a spiral contactor and a method for manufacturing the same, which can deal with a semiconductor device having a narrow pitch or a super miniaturized pair-chip, and in which a contact length of equal to or more than one rotation is secured, and which can deal with an insulation substrate without a through-hole, and to provide a semiconductor inspection device and an electronic component using the same. SOLUTION: In the spiral contactor 20 which is constituted so as to connect with a semiconductor device 8 or the electronic component, in which a spiral contact element 2 having a spiral shape in plan view and electrically connecting with a terminal of the semiconductor device 8 or the electronic component is provided on the insulation substrate so as to be capable of being deformed according to the shape of a spherical connection terminal 7, in contacting with the spherical connection terminal 7, the spiral part of the spiral contact element 2 has a constant width, and the thickness thereof is increased as it approaches from the tip to the root. COPYRIGHT: (C)2004,JPO |
