| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection aligner having the ability of highly accurate positioning. SOLUTION: The mask mark 51 of a photomask 50 is irradiated with exposure light by an exposure lighting device 4. The image is formed in an imaging section 5 through a projection exposure lens 70, picked up by a CCD camera 2, with the data prepared and recorded in an arithmetic and control unit 11, and then used as a recorded mask mark 51'. After that, a substrate mark 61 is irradiated with infra-red light by an infra-red light emission device 3 to obtain the image of the substrate mark 61, with a positional error detected between the mask mark 51' and the substrate mark 61, and then the positioning is performed. The mask mark 51' and the substrate mark 61 are simultaneously displayed in a manner superimposed on a display device 12. COPYRIGHT: (C)2004,JPO |
