| 摘要 |
PROBLEM TO BE SOLVED: To provide a pneumatic cylinder wherein stable slide performance and seal performance is maintained regardless of temperature change while using air bearings. SOLUTION: This pneumatic cylinder comprises a shaft member 14 provided with a piston 11 and a piston rod 3 axially coupled with each other, a cylinder main body 2 having the piston rod 3 protruded outward to support the shaft member 14 to be capable of linearly reciprocating, and porous air bearings 9 and 12 incorporated in the cylinder main body 2 to respectively slidably support the piston 11 and the piston rod 3. For a material for the shaft member 14, the cylinder main body 2, and the air bearings 9 and 12, one having a roughly similar thermal expansion coefficient is used. Clearance between the shaft member 14 and the air bearings 9 and 12 is maintained constant regardless of temperature change, thereby performance of an air layer formed between them, that is, slide performance and seal performance are stably maintained regardless of temperature change. COPYRIGHT: (C)2004,JPO
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