| 摘要 |
PROBLEM TO BE SOLVED: To accurately control a valve opening by a pressure responding means without affected by pressure difference between a primary-side pressure and a secondary-side pressure by a pressure-responding type flow control valve. SOLUTION: A diaphragm device 24 is mounted as a pressure responding means sensing the pressure and driving a valve element 20 in the valve axial direction in accordance with the sensed pressure, a pressure equalizing chamber 17 is defined at a side of a primary chamber 14 by a pressure equalizing diaphragm 35 connected to the valve element 20, and a secondary-side pressure P2 of a secondary-side port 13 is introduced to the pressure equalizing chamber 17. COPYRIGHT: (C)2004,JPO
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