| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device capable of detecting a defect properly in a technology for inspecting a pattern of an object. <P>SOLUTION: This inspection device 1 has an imaging part 2 for imaging a substrate 9, an operation part 4 where an image signal is inputted from the imaging part 2, and a computer 5. The operation part 4 specifies an inspection image and a reference image from an object image acquired by the imaging part 2. The operation part 4 specifies the classification of a region to which each pixel of the specified inspection image belongs, based on a pixel value of the pixel of a corresponding reference image. In a comparison inspection circuit of the operation part 4, the absolute value of the difference between each pixel of the inspection image and the pixel of the corresponding reference image is calculated, and a defect determination threshold corresponding to the specified region classification is compared with the differential absolute value, to thereby determine the defect. Hereby, the defect can be detected properly corresponding to the classification of the region to which the pixel belongs in the inspection device 1. <P>COPYRIGHT: (C)2004,JPO |
