A rotary target for use in a physical deposition process. The rotary target comprises at least one rotary target segment mechanically disposed on a backing tube.
申请公布号
WO2004005574(A2)
申请公布日期
2004.01.15
申请号
WO2003US21211
申请日期
2003.07.02
申请人
ACADEMY PRECISION MATERIALS A DIVISION OF ACADEMY;WITYAK, GEORGE;WEBB, BRUCE, W.
