摘要 |
An object of inspection is an active matrix substrate including a plurality of pixels, each of the plurality of pixels being connected with one of a plurality of signal lines, one of a plurality of scanning lines, and one of a plurality of voltage supply lines, and including a pixel select transistor connected with the one signal line and the one scanning line and an operating transistor, a gate of the operating transistor being connected with the pixel select transistor, a drain of the operating transistor being connected with the one voltage supply line, and a source of the operating transistor being in an open state. This inspection method includes charging a parasitic capacitor between the gate and the drain of the operating transistor by supplying a potential from an inspection device, measuring discharge current from the parasitic capacitor by using the inspection device by discharging the parasitic capacitor, and determining whether or not a defect exists in each of the plurality of pixels by using the inspection device based on a value of the discharge current.
|