| 摘要 |
PROBLEM TO BE SOLVED: To obtain required resolution and prescribed scanning velocity (exposure velocity) in a main scanning direction and a subscanning direction and further to obtain a compensation function of illumination unevenness and pixel defect. SOLUTION: A DMD (digital micromirror device) 50 having m pixels in the main scanning direction is inclined by 1/m to the main scanning direction of an exposure head. When a required dot pitch in the subscanning direction is r and a pitch of scanning lines is R, multiple exposure frequency N is made to be N=(R/r)×m. For example, when spatial light modulation element equipped with pixel number of 100 lines×200 columns is inclined by 1/m=1/100, 400 pixels are substantially subjected to simultaneous exposure. That is, a resolution in the subscanning direction (addressability) becomes twice. When the pitch R of the scanning line is 10μm and the dot pitch r in the subscanning direction is 5μm, N=(R/r)×m=(10/5)×100=50 and multiple exposure will be carried out 50 times. Further in order to set dot pitch in the main scanning direction (resolution) to 5μm similarly, exposure may be performed at every 5μm relative movement of an exposure head to an exposure surface. COPYRIGHT: (C)2004,JPO |
