| 摘要 |
PROBLEM TO BE SOLVED: To enable stable conveyance of a substrate by preventing the occurrence of a slip without lengthening a processing cycle for a substrate, in a part, where a slip is apt to occur, like a substrate receiving part. SOLUTION: A pusher type substrate conveying mechanism is provided instead of a conveyance roller at a part of a roller type substrate conveying line at conveyance type substrate equipment. The substrate feeding mechanism is provided with a plurality of free rollers 110 supporting a substrate 100 movably in a conveyance direction; and a substrate pusher 120 to effect straight drive of the substrate, supported by the free roller 110, in a conveyance direction. COPYRIGHT: (C)2004,JPO |
