SEMICONDUCTOR INTEGRATED CIRCUIT, ELEMENTS WITH COOLING BODY AND TEMPERATURE SENSOR

摘要

PROBLEM TO BE SOLVED: To detect the temperature accurately and promptly especially when dissipating heat from an integrated circuit in the region of heat sink of a semiconductor circuit element when a sensor of small heat capacity is used. SOLUTION: A semiconductor element with an integrated circuit, a cooling body and a temperature sensor is provided where a temperature sensor has a thin-film shaped measurement resistor, this thin-film shaped measurement resistor is adhered on the surface of a thin-film like substrate which has electrically insulating characteristics, the whole thickness for the temperature sensor is within the range of 10μm to 100μm, and the temperature sensor is thermally connected with a cooling body. COPYRIGHT: (C)2004,JPO