| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an external force detection sensor device capable of detecting an angular velocity and an acceleration with high detection accuracy. <P>SOLUTION: When a vibration element 8 is vibrated in the detection direction due to an angular velocity or an acceleration, an angular velocity/acceleration mixed signal comprising an angular velocity component and an acceleration component is outputted from a differential amplification part 24. A synchronous detection part 27 detects synchronously the mixed signal by utilizing a reference signal for the angular velocity having the same phase as the phase of the angular velocity component, removes the angular velocity component from the mixed signal, and outputs an angular velocity signal corresponding only to the angular velocity component. A synchronous detection part 30 detects synchronously the mixed signal by utilizing a reference signal for the acceleration having the same phase as the phase of the acceleration component, removes the angular velocity component from the mixed signal, and outputs an acceleration signal corresponding only to the acceleration component. If a noise component is added to the angular velocity signal or the acceleration signal by a detection angle shift at the synchronous detection time by the synchronous detection parts 27, 30, the noise component is removed by attenuators 33, 35 and differential amplifiers 34, 36. <P>COPYRIGHT: (C)2004,JPO |
