| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage controlling apparatus which is capable of shortening a time required for moving a stage without having an adverse effect such as vibrations even when a travel distance of the stage is short, and to provide an exposure system and a stage control method. SOLUTION: The stage control device is equipped with an acceleration controller (controller 2) which is capable of performing acceleration control of the stage as an object of control, varying the ratio of the acceleration time T<SB>1</SB>to a time T<SB>b1</SB>occupying a part of the acceleration time T<SB>1</SB>, in which the stage moves, and keeping its acceleration nearly constant corresponding to the travel distance of the stage. COPYRIGHT: (C)2004,JPO |
