FLUID CONTROLLER

摘要

A fluid controller (1) comprises a metal-made body (2) and a metal-made slid e member (3). The metal-made body (2) has a fluid flow-in passage (2a), a flui d flow-out passage (2b), and a communication passage (2c) connecting the flow- in and flow-out passages. The metal-made slide member (3) closes or opens the communication passage (2c) by a tip end portion that is vertically moved in a vertical passage (11) including the communication passage (2c). At least a t ip end portion (3a) of the slide member (3) includes, in weight%, 0.001-0.01% o f C, 5% or less of Si, 2% or less of Mn, 0.03% or less of P, 100 ppm or less o f S, 50 ppm or less of O, 18 to 25% of Cr, 15 to 25% of Ni, 4.5-7.0% of Mo, 0. 5- 3.0% of Cu, and 0.1-0.3% of N, with the remainder being alloy substantially made up of Fe and other unavoidable impurities.