| 摘要 |
PROBLEM TO BE SOLVED: To achieve minimization of an unmagnified and telecentric projection aligning optical system. SOLUTION: The projection aligning optical system 10 projection aligns the patterns of a mask 2 in nearly unmagnification to a plate 3 by the light emitted from an illumination optical system 1. The projection aligning optical system 10 has first and second condenser lenses 11 and 15 which are telecentric to both of an object side and an image side and have a common first optical axis Ax 1 nearly perpendicular to the mask 2 and the plate 3, an imaging lens 13 which has a second optical axis AX 2 intersecting perpendicularly with the first optical axis Ax 1 in the intermediate position between the condenser lenses, a first mirror 12a which reflects the luminous flux from the mask 2 and makes the luminous flux incident on the imaging lens 13, a second mirror 14 which reflects the luminous flux transmitted through the imaging lens 13 and makes the luminous flux incident on the imaging lens 13 and a third mirror 12 which reflects the luminous flux passing back and forth the imaging lens 13 and makes the luminous flux incident on the second condenser lens 15. COPYRIGHT: (C)2004,JPO |
