| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a radiation detection instrument which improves an aperture ratio by a laminated structure and by a simple process. SOLUTION: The radiation detection instrument comprises a gate electrode 204 and a drive wiring 202 of a switch TFT formed by a first metal layer, a first insulating layer 205 sequentially laminated thereon, a first semiconductor layer 206, an ohmic contact layer 207 laminated thereon, the source drain electrode 209 and a signal line 210 of the switch TFT formed by a second metal layer laminated thereon, and the lower electrode of a radiation signal shaping element, a second insulating layer 301 sequentially laminated thereon, a second semiconductor 302, and a second ohmic contact layer 303 formed at a predetermined section, a connection hole 306, a bias wiring 208 of the radiation signal shaping element formed by a third metal layer laminated, a transparent electrode layer 304 laminated thereon and a protective layer 220. COPYRIGHT: (C)2004,JPO
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