STORING METHOD AND CLEANING METHOD OF COATER, AND COATING METHOD USING THE COATER

摘要

PROBLEM TO BE SOLVED: To provide a storing method and a cleaning method of a coater capable of changing the variety of coaters without carrying out the disassembly/cleaning/assembly in every new coating and stably applying a coating liquid without flowing a large quantity of the liquid in the start-up of the coating and a coating method using the coater. SOLUTION: In the storing method of the coater having at least one set of a slit and a pocket and for applying at least one layer of the coating liquid on a belt like supporting body, after the completion of the coating by the coater, the coater is cleaned with a cleaning liquid and is stored after a storing liquid is filled in the inside of the coater. COPYRIGHT: (C)2004,JPO