摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a resistive element and its producing process, in which an oxide film being formed on the resistor can be removed correctly without causing any variation in the resistance, oxidation from the organic film side of the resistor can be prevented effectively, and a desired resistance expected by design can be attained. <P>SOLUTION: The resistor 3 comprises a plurality of resistive layers 3a and 3b of different specific resistance formed, in layer, on a substrate 2 wherein the resistive layer 3a of higher specific resistance is formed on the upper layer side. Antioxidation layers 15 and 21 for preventing oxidation of the resistor 3 are formed between the organic film 8 and the resistor 3. <P>COPYRIGHT: (C)2004,JPO</p> |