| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact vacuum system capable of efficiently performing both of vacuum suction and air supply. SOLUTION: A general-purpose vacuum pump 12 is installed to this vacuum system 10, and a positive pressure side tank 22, a positive pressure side electromagnetic valve 24, and a positive pressure side connection piping part 26 are sequentially connected with an exhaust side of the vacuum pump 12. A negative pressure side tank 32, a negative pressure electromagnetic valve 34, and a negative pressure side connection piping part 36 are sequentially connected with a negative pressure side of the vacuum pump 12. The vacuum system 10 is further equipped with an adsorption pad 44 for adsorbing and holding a work with an air adsorption force, and a connection piping part 46 connected with the adsorption pad 44, the positive pressure side connection piping part 26, and the negative pressure side connection piping part 36 are communicated with each other by a three-way connection part 50. One vacuum pump 12 can switchably supply any of positive pressure and negative pressure to the absorption pad 44. COPYRIGHT: (C)2004,JPO
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