| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric filter having good attenuation characteristics by increasing resonance Q, and also to provide an electronic component having the filter. SOLUTION: A plurality of piezoelectric resonators 11, 12 having a piezoelectric thin film 1 formed on a silicon substrate 7 and electrodes 2, 3, 4 facing the substrate 7 with the film 1 sandwiched therebetween are provided so as to have a filter function. The electrode material of the resonator 12 is set so as to be different from that of the other resonator 11, for example, be larger in stiffness. COPYRIGHT: (C)2004,JPO
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