METHOD FOR VACUUM TREATMENT AND VACUUM TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for a vacuum treatment and a vacuum treatment apparatus which is capable of carrying out a stable surface treatment of a substrate all the time by effectively preventing the attachment of chloride or the like to a filament of a measuring head section of a vacuum gauge and the erosion of the section by chloride or the like. SOLUTION: When starting to introduce a reaction gas or starting to supply high frequency power, the vacuum gauge 11 is insulated from an internal atmosphere of a vacuum treatment vessel 1, and the insulated state is held at least while carrying out a surface treatment of the treated substrate 7. When the inside of the vacuum treatment vessel 1 becomes the atmospheric pressure, the vacuum gauge 11 is insulated from the internal atmosphere of the vacuum treatment vessel 1, and the insulated state is held while the inside of the vacuum treatment vessel 1 is kept at the atmospheric pressure. COPYRIGHT: (C)2004,JPO