| 摘要 |
PROBLEM TO BE SOLVED: To make possible the uniform temperature of the inside of a suscepter; to make usable a low heating frequency without the restriction of any heating frequency, with respect to a high-temperature heating apparatus having the carbon suscepter used in a wafer-film manufacturing apparatus, etc. SOLUTION: The high-temperature heating apparatus comprises a quartz tube 31 having an opening/closing portion 3 on one side and an exhausting portion 4 on the other side, an angular-tube-form suscepter 32 having a rectangular section which is made of carbon and is provided in the longitudinally central portion of the quartz tube 31, a heat insulating material 34 interposed between the outer peripheral surface of the suscepter 32 and the inner peripheral surface of the quartz tube 31, and a high-frequency induction coil 35 wound around the longitudinally outer peripheral portion of the quartz tube 31. Further, a high-frequency current is so fed to the high-frequency induction coil as to heat a heated object 33 mounted in the angular-tube-form suscepter 32. COPYRIGHT: (C)2004,JPO
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