| 摘要 |
PROBLEM TO BE SOLVED: To provide equipment for inspecting an inner lead, in which carrying speed of a tape can be enhanced. SOLUTION: The equipment, inspecting each inner lead 64a, 64b for horizontal bend thereof by imaging a plurality of inner leads 64a and 64b arranged in parallel on a film carrier tape by means of a CCD line sensor 10 while carrying the film carrier tape, comprises a first CCD line sensor 12 for imaging the inner lead 64a parallel in the carrying direction 18 of the tape, and a second CCD line sensor 14 for imaging the inner lead 64b perpendicular to the carrying direction of the tape. A CCD line sensor having the number of pixels smaller than that of the first CCD line sensor 12 is employed as the second CCD line sensor 14. COPYRIGHT: (C)2004,JPO
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