| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method of the re-coupling life time of a semiconductor wafer, which can use an ordinary measuring apparatus without a modification and can also use chemical passivation to use a sample which can be moved automatically. SOLUTION: The measuring method of the re-coupling life time of a semiconductor wafer based on theμ-PCD method uses a sample which is manufactured by covering iodine ethanol solution on the semiconductor wafer with teflon or the like in the shape of a transparent sheet after the iodine ethanol solution is dropped on the wafer. COPYRIGHT: (C)2004,JPO
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