| 摘要 |
PROBLEM TO BE SOLVED: To form a vane type vacuum pump for reducing frictional resistance. SOLUTION: This vane type vacuum pump is composed of a cam cylinder 5 having a deformed circular shape in a deformed state of an inner peripheral surface 51, a rotor 3 for making rotary motion in an eccentric state to the cam cylinder 5, a vane 1 existing in a slit groove 33 arranged on the rotor 3, making sliding motion in the slit groove 33 and making rotary motion so that both end parts run along the inner peripheral surface 51 of the cam cylinder 5 and a seal member 17 existing in a recessed groove 19 formed in a tip part of the vane 1 and making sliding motion on the inner peripheral surface 51 of the cam cylinder 5 by projecting by centrifugal force caused by the rotary motion when the rotor starts rotary motion. The vane 1 is provided with a through hole 11 having the prescribed length in the lengthwise direction and formed so as to penetrate through both side surface parts of the vane 1. COPYRIGHT: (C)2004,JPO
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