| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a single crystal, which is capable of safely releasing the pressure without floating up a pull chamber or the like when the internal pressure of the chamber of the apparatus for manufacturing the single crystal raises drastically. SOLUTION: The apparatus for manufacturing the single crystal by a Czochralski method, is equipped with at least a main chamber for melting a raw material and for pulling the single crystal from a molten raw material, a pull chamber for storing the pulled single crystal, an isolation valve for isolating the main chamber and the pull chamber, and a safety valve which is opened by the pressure in the chamber. The safety valve functions so that the opening pressure, F(kg/cm<SP>2</SP>) satisfies following relation: F<W/A (wherein, A (cm<SP>2</SP>) is the cross sectional area of the maximum sealing face of the main chamber; and W (kg) is total weight loaded on the maximum sealing face). COPYRIGHT: (C)2004,JPO
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