发明名称 |
Lens holder used in lithography for wafer inspection has an external fastening and inner optical element with elastomeric vibration damper between outer and inner sections |
摘要 |
<p>A component comprises an exterior fastening and an optical element, preferably in an inner holder, comprising sprung bridges between the outer holder and inner region. An internal space between the bridges and fastening comprises at least partly an elastomeric vibration damping connection.</p> |
申请公布号 |
DE10229623(A1) |
申请公布日期 |
2004.01.15 |
申请号 |
DE2002129623 |
申请日期 |
2002.06.28 |
申请人 |
CARL ZEISS JENA GMBH |
发明人 |
BECHSTEIN, KARL-HEINZ;MENCK, ALEXANDER;BERLEB, STEFAN;ROSENKRANZ, NORBERT |
分类号 |
G02B7/02;(IPC1-7):G02B7/00 |
主分类号 |
G02B7/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|