| 摘要 |
PROBLEM TO BE SOLVED: To secure cleanness in a work area for performing assembly, machining, conveying and the like of a workpiece. SOLUTION: This clean assembly module device is provided with a clean air generating means 22 in the device upper part. The device is constructed so that a work area A, a clean air stopping and discharging area B, and a mechanism part area C are arranged from the device upper side. The outer circumference of the work area A is shielded by a clean area shield wall 3, while a fluid resistance between the work area A and the clean air stopping and discharging area B is controlled by means of a partition wall 4 having a plurality of small holes. Air passing through the work area A and the clean air stopping and discharging area B is discharged to the outside of the device by means of an exhaust fan 5. The work area A is set at a positive pressure, and a pressure of the mechanism part area C is lowered below that of the work area A. A pressure of the clean air stopping and exhausting area B is regulated by means of the small holes in the partition wall 4 and the rotational speed of the exhaust fan 5 so that the pressure becomes middle of those of the work area A and the mechanism part area C. COPYRIGHT: (C)2004,JPO
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