LINING MATERIAL OF HEAT TREATMENT FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a lining material for a heat treatment furnace reducing dispersion in firing temperatures of a treating object in a treatment part in the heat treatment furnace and holding the cleanliness of the treatment part high. SOLUTION: This lining material for the heat treatment furnace is formed of crystallized glass having the transmissivity of visible light (500nm or less) and infrared rays (1100nm) of 5% or less and 70% or more respectively, when its thickness is assumed 5mm. This lining material is characterized in having thermal expansion coefficients (30-750°C) of -5×10-7to 5×10-7/K. COPYRIGHT: (C)2004,JPO