发明名称 Compositions and methods involving direct write optical lithography
摘要 In one embodiment, fiber optic arrays or bundles are used as a light guide to transmit ultraviolet light to the substrate surface for photo-directed polymer synthesis. Digital Micromirror Array (DMA) is used as a switching device to reflect light onto the entry side of the fiber optic array.
申请公布号 US2004008811(A1) 申请公布日期 2004.01.15
申请号 US20020318838 申请日期 2002.12.12
申请人 AFFYMETRIX, INC. 发明人 YAMAMOTO MELVIN
分类号 G03F7/20;(IPC1-7):G21K5/00 主分类号 G03F7/20
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